Industrial Tech

Lam Research and JSR/Inpria partner on Semiconductor tech

Lam Research Corp., a top player in semiconductor equipment, has signed a non-exclusive cross-licensing and collaboration deal with JSR Corporation and its subsidiary, Inpria Corporation. Inpria specializes in metal oxide photoresist solutions. The agreement seeks to speed up progress in semiconductor manufacturing. It highlights new patterning technologies, such as dry resist for EUV lithography. It also aims to promote the creation of materials for atomic layer etching and deposition. Combining strengths in materials and equipment for leading-edge patterning This partnership combines JSR Group’s skills in innovative semiconductor materials, like advanced metal oxide solutions, with Lam’s top-notch abilities in deposition, etch, and EUV patterning. Lam’s Aether® system is a game-changing dry resist platform. It lowers costs and makes it easier to create complex chip patterns for AI and high-performance computing. Accelerating…