日本語 
Hitachi High-Tech has brought forth the SU9600, a new-generation ultrahigh-resolution scanning electron microscope (SEM) for cutting-edge semiconductor and materials research. The upgraded version provides not only the sub-nanometer-level observation capability but also the enhanced precision, fast data acquisition, and automated imaging workflows that come with it. It builds on Hitachi’s proprietary Cold Field Emission Electron Gun and in-lens objective technologies, delivering higher image stability, brightness, and signal clarity.
The SU9600 addresses the growing demand for high-throughput, high-precision analysis as AI-driven semiconductor development accelerates. By integrating automated observation functions and large-scale data handling, it streamlines research and manufacturing processes while reducing operator workload.
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As part of Hitachi’s Lumada 3.0 digital strategy, the SU9600 acts as a data-generating digital asset supporting ‘HMAX for Industry,’ a platform aimed at expanding integrated industry automation. Positioned as Hitachi High-Tech Corporation’s flagship SEM, the SU9600 strengthens the company’s role in enabling data-driven innovation across semiconductors, electronics, and advanced materials, which are key sectors driving the next wave of digital transformation.
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